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Browsing by Author "Scheid, D."

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    Material characteristics and damascene patterning of a fluoropolymer low-k film

    Struyf, Herbert  
    ;
    Donaton, R. A.
    ;
    Lepage, Muriel
    ;
    Lanckmans, Filip
    ;
    Vereecke, Guy  
    ;
    Maex, Karen  
    Oral presentation
    2000, Advanced Metallization Conference; October 2000; San Diego, CA, USA.

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