Browsing by Author "Scherübl, Thomas"
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Publication Impact of alternative mask stacks on the imaging performance at NA 1.20 and above
Proceedings paper2007, SPIE Photomask Technology (BACUS), 18/09/2007, p.67301NPublication Increasing the predictability of AIMS measurements by coupling to resist simulations
Publication Using the AIMS 45-193i for hyper-NA imaging applications
Proceedings paper2007, SPIE Photomask Technology (BACUS), 18/09/2007, p.67301G