Publication:

Increasing the predictability of AIMS measurements by coupling to resist simulations

Date

2008
Proceedings Paper
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Author(s)

Meliorisz, Balint
;
Erdmann, Andreas
;
Schnattinger, Thomas
;
Strössner, Ulrich
;
Scherübl, Thomas
;
De Bisschop, Peter  
;
Philipsen, Vicky  

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