Browsing by Author "Scheruebl, Thomas"
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication AIMS TM 45 inspection of CH treated with inverse lithography
Proceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008Publication Application of pixel-based mask optimization technique for high-transmission attenuated PSM
Proceedings paper2009, Design for Manufacturability through Design-Process Integration III, 22/02/2009, p.72750XPublication Test of vector effect emulation of the AIMSTM45-193i
Oral presentation2007, 4th International Immersion Lithography Symposium