Browsing by Author "Schild, R."
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Publication Elimination of HF-last cleaning related CoSi2 defects formation
Proceedings paper1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.177-180Publication Marangoni drying: a new concept for drying silicon wafers
Proceedings paper1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.31-34Publication New drying techology for advanced cleaning in IC manufacturing
Proceedings paper1994, Vacuum and Semiconductor Processing Conference, 15/06/1994