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Browsing by Author "Schmöller, Thomas"

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    Experimental validation of stochastic modeling for negative-tone develop EUV resist

    Kamohara, Itaru
    ;
    Gao, Weimin  
    ;
    Klostermann, Ulrich
    ;
    Schmöller, Thomas
    ;
    Demmerle, Wolfgang
    Proceedings paper
    2015, Extreme Ultraviolet (EUV) Lithography VI, 22/02/2015, p.942223

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