Publication:

Experimental validation of stochastic modeling for negative-tone develop EUV resist

Date

2015

Proceedings Paper

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Author(s)

Kamohara, Itaru

;

;

Klostermann, Ulrich

;

Schmöller, Thomas

;

Demmerle, Wolfgang

;

;

De Simone, Danilo

;

Hendrickx, Eric

;

Vandenberghe, Geert

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Acq. date: 2026-01-26