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Browsing by Author "Schmoeller, Thiomas"

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    Physical resist models and their calibration: their readiness for accurate EUV lithography simulation

    Klostermann, Ulrich K.
    ;
    Muelders, Thomas
    ;
    Schmoeller, Thiomas
    ;
    Lorusso, Gian  
    ;
    Hendrickx, Eric  
    Proceedings paper
    2010, Extreme Ultraviolet (EUV) Lithography, 21/02/2010, p.763619

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