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Browsing by Author "Schulte, W.H."

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    Surface preparation and interfacial stability of high-k dielectrics deposited by atomic layer chemical vapor deposition

    Tsai, Wilman
    ;
    Carter, Richard
    ;
    Nohira, Hiroshi
    ;
    Caymax, Matty  
    ;
    Conard, Thierry  
    ;
    Cosnier, Vincent
    Journal article
    2003, Microelectronic Engineering, (65) 3, p.259-272

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