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Surface preparation and interfacial stability of high-k dielectrics deposited by atomic layer chemical vapor deposition
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1985 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-08
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Metrics
Views
1985 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-08
Citations