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Browsing by Author "Schulze, H.J."

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    Low temperature doping of silicon by hydrogen plasma treatments

    Job, R.
    ;
    Ulyashin, A.G.
    ;
    Ma, Y.
    ;
    Fahrner, W.R.
    ;
    Simoen, Eddy  
    ;
    Rafi, Joan Marc
    ;
    Claeys, Cor
    Proceedings paper
    2002, High Purity Silicon VII, 20/10/2002, p.141-154

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