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Browsing by Author "Scuderi, V."

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    Exploring crystal recovery and dopant activation in coated laser annealing on ion implanted 4H-SiC epitaxial layers

    Calabretta, C.
    ;
    Pecora, A.
    ;
    Agati, Marta  
    ;
    Muoio, A.
    ;
    Scuderi, V.
    ;
    Privitera, S.
    ;
    Reitano, R.
    Journal article
    2024, MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, (174) May, p.Art. 108175

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