Browsing by Author "Sedky, S."
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Publication Characterization of reduced-pressure chemical vapor deposition polycrystalline silicon germanium deposited at temperatures <= 550 degrees C
Journal article2002, Journal of Materials Research, (17) 7, p.1580-1586Publication Micromachined on-chip dielectric resonator antenna operating at 60 GHz
Journal article2015, IEEE Transactions on Antennas and Propagation, (63) 8, p.3410-3416Publication New low-stress PECVD Poly-SiGe layers for MEMS
Journal article2003, Journal of Microelectromechanical Systems, (12) 6, p.816-825