Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Seidel, Tom"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    AVD and MOCVD TaCN-based films for gate metal applications on high-k gate dielectrics

    Karim, Zia
    ;
    Barbar, Ghassan
    ;
    Boissiere, Olivier
    ;
    Lehnen, Peer
    ;
    Lohe, Christoph
    ;
    Seidel, Tom
    Proceedings paper
    2007-10, Physics and Technology of High-k Dielectrics, 7/10/2007, p.557-567

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings