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Browsing by Author "Seitzinger, Bernard"

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    Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric

    Van Elshocht, Sven  
    ;
    Weber, U.
    ;
    Conard, Thierry  
    ;
    Kaushik, Vidya
    ;
    Houssa, Michel  
    ;
    Hyun, Sangjin
    Journal article
    2005, Journal of the Electrochemical Society, (152) 11, p.F185-F189

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