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Browsing by Author "Selinger, T."

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    Integration of ultra shallow junctions in PVD TaN nMOS transistors with flash lamp annealing

    Severi, Simone  
    ;
    De Meyer, Kristin  
    ;
    Pawlak, Bartek  
    ;
    Duffy, Ray
    ;
    Kerner, Christoph  
    ;
    McCoy, S.
    Proceedings paper
    2005-10, Extended Abstracts International Conference on Solid State Devices and Materials - SSDM, 13/09/2005, p.910-911

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