Browsing by Author "Shaefer, Herbert"
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Publication The use of ion implantation of strained silicon on SiO2 for nanoelectronic devices
;Mantl, S. ;Buca, Dan ;Hollander, Bernd ;Trinkaus, Helmut ;Hueging, NorbertLuysberg, MartinaProceedings paper2005, MRS Fall Meeting Symposium OO: Growth, Modification, and Analysis by Ion Beams at the Nanoscale, 28/11/2005