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Browsing by Author "Shaefer, Herbert"

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    The use of ion implantation of strained silicon on SiO2 for nanoelectronic devices

    Mantl, S.
    ;
    Buca, Dan
    ;
    Hollander, Bernd
    ;
    Trinkaus, Helmut
    ;
    Hueging, Norbert
    ;
    Luysberg, Martina
    Proceedings paper
    2005, MRS Fall Meeting Symposium OO: Growth, Modification, and Analysis by Ion Beams at the Nanoscale, 28/11/2005

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