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Browsing by Author "Shamieh, Basel"

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    Model-free measurement of lateral recess in gate-all-around transistors with micro hard-X-ray fluorescence

    Bogdanowicz, Janusz  
    ;
    Oniki, Yusuke  
    ;
    Kenis, Karine  
    ;
    Puttarame Gowda, Pallavi  
    ;
    Mertens, Hans  
    Journal article
    2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 3, p.Art. 034001

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