Publication:

Model-free measurement of lateral recess in gate-all-around transistors with micro hard-X-ray fluorescence

Date

2023
Journal article
https://doi.org/10.1117/1.JMM.22.3.034001
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 1.62 MB

Author(s)

Bogdanowicz, Janusz  
;
Oniki, Yusuke  
;
Kenis, Karine  
;
Puttarame Gowda, Pallavi  
;
Mertens, Hans  
;
Shamieh, Basel
;
Leon, Yonatan
;
Wormington, Matthew
;
Van der Meer, Juliette
;
Charley, Anne-Laure  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

Abstract

Description

Statistics

Downloads

361 since deposited on 2023-12-15
32last month
5last week
Acq. date: 2026-03-17

Views

901 since deposited on 2023-12-15
1last month
Acq. date: 2026-03-17

Citations

Statistics

Downloads

361 since deposited on 2023-12-15
32last month
5last week
Acq. date: 2026-03-17

Views

901 since deposited on 2023-12-15
1last month
Acq. date: 2026-03-17

Citations