Publication:

Model-free measurement of lateral recess in gate-all-around transistors with micro hard-X-ray fluorescence

Date

2023
Journal article
https://doi.org/10.1117/1.JMM.22.3.034001
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Author(s)

Bogdanowicz, Janusz  
;
Oniki, Yusuke  
;
Kenis, Karine  
;
Puttarame Gowda, Pallavi  
;
Mertens, Hans  
;
Shamieh, Basel
;
Leon, Yonatan
;
Wormington, Matthew
;
Van der Meer, Juliette
;
Charley, Anne-Laure  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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