Browsing by Author "Shen, M."
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Publication A systematic study of trade-offs in engineering a locally strained pMOSFET
Proceedings paper2004, Technical Digest International Electron Devices Meeting - IEDM, 13/12/2004, p.1055-1058Publication Characterization of etch residues generated on damascene structures
Proceedings paper2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.227-231