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Browsing by Author "Shen, P"

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    Low-k material cryoetch using high boiling point organic compounds to reduce plasma induced damage

    Chanson, Romain
    ;
    Tillocher, Thomas
    ;
    Lefaucheux, Philippe
    ;
    Dussart, Remi
    ;
    Zhang, Liping  
    Meeting abstract
    2018, Dry Process Symposium, 13/11/2018

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