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Browsing by Author "Shen, Peng"

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    Cryo-etching for integration in micro-electronic : Silicon deep etch for contact and low-k integration in Back end of line (BEOL)

    Chanson, Romain
    ;
    Lefaucheux, Philippe
    ;
    Dussart, Remi
    ;
    Shen, Peng
    ;
    Urabe, Keiichiro
    Meeting abstract
    2017, iplasmaNano-VIII: 8th International Conference on Plasma Nanoscience, 2/07/2017, p.77

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