Publication:
Cryo-etching for integration in micro-electronic : Silicon deep etch for contact and low-k integration in Back end of line (BEOL)
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2036 since deposited on 2021-10-24
4last month
Acq. date: 2026-02-27
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Views
2036 since deposited on 2021-10-24
4last month
Acq. date: 2026-02-27
Citations