Browsing by Author "Shibata, Toshiaki"
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Publication 3D stacking cobalt and nickel microbumps and kinetics of corresponding IMCs at low temperatures
Proceedings paper2017, IEEE International Interconnect Technology Conference - IITC, 16/05/2017, p.1-3Publication Improvement in post-Chemical Mechanical Planarization cleaning process for Ru interconnects
Oral presentation2019, The Surface Preparation And CLeaning Conference (SPCC)