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Browsing by Author "Shida, Kazuki"

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    Tomographic mapping analysis in the depth direction of high-Ge-content SiGe layers with compositionally graded buffers by nanobeam X-ray diffraction

    Shida, Kazuki
    ;
    Takeuchi, Shotaro
    ;
    Imai, Yasuhiko
    ;
    Kimura, Shigeru
    ;
    Schulze, Andreas
    Journal article
    2017, ACS Applied Materials & Interfaces, (9) 15, p.13726-13732

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