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Tomographic mapping analysis in the depth direction of high-Ge-content SiGe layers with compositionally graded buffers by nanobeam X-ray diffraction
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Tomographic mapping analysis in the depth direction of high-Ge-content SiGe layers with compositionally graded buffers by nanobeam X-ray diffraction
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Date
2017
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Shida, Kazuki
;
Takeuchi, Shotaro
;
Imai, Yasuhiko
;
Kimura, Shigeru
;
Schulze, Andreas
;
Caymax, Matty
;
Sakai, Akira
Journal
ACS Applied Materials & Interfaces
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1919
since deposited on 2021-10-24
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Acq. date: 2025-12-10
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Views
1919
since deposited on 2021-10-24
2
last month
Acq. date: 2025-12-10
Citations