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Browsing by Author "Shimizu, Akira"

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    Thin film characterization of PEALD Ru layers on an ALD WNC substrate

    Volders, Henny  
    ;
    Tokei, Zsolt  
    ;
    Sinapi, Fabrice
    ;
    Bender, Hugo  
    ;
    Benedetti, Alessandro
    ;
    Brijs, Bert
    Proceedings paper
    2007, Advanced Metallization Conference 2006 - AMC 2006, 17/10/2006, p.227-232

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