Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Shiratani, Motohiro"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Novel metal containing resists for EUV lithography extendibility

    De Simone, Danilo  
    ;
    Sayan, Safak
    ;
    Dei, Satoshi
    ;
    Pollentier, Ivan  
    ;
    Kuwahara, Yuhei
    Proceedings paper
    2016, Extreme Ultravioelt (EUV) Lithography, 21/02/2016, p.977606

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings