Publication:

Novel metal containing resists for EUV lithography extendibility

Date

2016

Proceedings Paper

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Files

34347.pdf 1.31 MB

Author(s)

De Simone, Danilo

;

;

;

Pollentier, Ivan

;

Kuwahara, Yuhei

;

Vandenberghe, Geert

;

Nafus, Kathleen

;

Shiratani, Motohiro

;

Nakagawa, Hisashi

;

Naruoka, Takehiko

Metrics

1940 since deposited on 2021-10-23

2last month

Acq. date: 2025-12-11