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Browsing by Author "Shubhakar, Kalya"

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    Physical analysis of beakdown in High-k /metal gate stacks using TEM/EELS and STM for relibaility enhancement

    Pey, Kin Leong
    ;
    Raghavan, Nagarajan
    ;
    Wu, Xing
    ;
    Liu, Wenhu
    ;
    Li, Xiang
    ;
    Bosman, Michel
    Journal article
    2011, Microelectronic Engineering, (88) 7, p.1365-1372

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