Publication:

Physical analysis of beakdown in High-k /metal gate stacks using TEM/EELS and STM for relibaility enhancement

Date

2011
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

22647.pdf 2.19 MB

Author(s)

Pey, Kin Leong
;
Raghavan, Nagarajan
;
Wu, Xing
;
Liu, Wenhu
;
Li, Xiang
;
Bosman, Michel
;
Shubhakar, Kalya
;
Lwin, Zin Zar
;
Chen, Yining
;
Qin, Hailang
;
Kauerauf, Thomas

Journal

Microelectronic Engineering

Abstract

Description

Statistics

Views

1954 since deposited on 2021-10-19
3last month
Acq. date: 2026-01-26

Citations

Statistics

Views

1954 since deposited on 2021-10-19
3last month
Acq. date: 2026-01-26

Citations