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Physical analysis of beakdown in High-k /metal gate stacks using TEM/EELS and STM for relibaility enhancement
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1964 since deposited on 2021-10-19
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Acq. date: 2026-10-09
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Statistics
Views
1964 since deposited on 2021-10-19
1last month
1last week
Acq. date: 2026-10-09
Citations