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Physical analysis of beakdown in High-k /metal gate stacks using TEM/EELS and STM for relibaility enhancement
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1950 since deposited on 2021-10-19
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Acq. date: 2025-10-25
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Views
1950 since deposited on 2021-10-19
454item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations