Browsing by Author "Siewert, Frank"

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Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

Hoenicke, Philipp
;
Kayser, Yves
;
Nikolaev, Konstantin, V
;
Soltwisch, Victor
;
Scheerder, Jeroen
Journal article
2022, SMALL, (18) 6, p.2105776
Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniques

Hoenicke, Philipp
;
Kayser, Yves
;
Soltwisch, Victor
;
Waehlish, Andre
;
Wauschkuhn, Nils
Proceedings paper
2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023