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Browsing by Author "Sik, H.W."

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    High performance & CMOS integration friendly dual metal gate MOSFETs using TaN/Ru or TaN/W/Ru stacking multi-layers on HfLaO gate dielectric

    Wang, X.P.
    ;
    Li, M.F.
    ;
    Yu, HongYu
    ;
    Yang, J.J.
    ;
    Loh, W.Y.
    ;
    Zhu, C.X.
    ;
    Du, A.Y.
    ;
    Trigg, A.D.
    ;
    Zhang, G.
    Proceedings paper
    2007, International Conference on Solid State Devices and Materials - SSDM, 18/09/2006

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