Browsing by Author "Simms, Ihsan"
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Publication Development of integrated wet cleans for 3D-SIC technologies
Proceedings paper2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.150-153Publication Focus spot reduction by brush scrubber cleaning
Proceedings paper2014, Ultra Clean Processing of Semiconductor Surfaces - UCPSS XII, 22/09/2014, p.276-279Publication Partial wetting of aqueous solutions on high aspect ratio nanopillars with hydrophilic surface finish
Journal article2014, ECS Journal of Solid State Science and Technology, (3) 1, p.N3095-N3100Publication UV-induced modification of fluorocarbon polymer for improvement of wet removal
; ; ; Meeting abstract2012, Sematech Surface Preparation and Cleaning Conference - SPCC, 19/03/2012Publication UV-induced modification of fluorocarbon polymer for improvement of wet removal
; ; ; Journal article2014, Microelectronic Engineering, 114, p.136-140Publication Wet removal of post-etch residues by a combination of UV irradiation and a SC1 process
Proceedings paper2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.114-118Publication Wetting behavior of aqueous solutions on high aspect ratio nanopillars with hydrophilic surface finish
; ; ; ; Proceedings paper2013, Semiconductor Cleaning Science and Technology 13, 27/10/2013, p.171-182