Publication:

Wet removal of post-etch residues by a combination of UV irradiation and a SC1 process

Date

2013

Proceedings Paper

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Author(s)

;

;

Simms, Ihsan

;

Nafus, Kathleen

;

Struyf, Herbert

;

De Gendt, Stefan

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1896 since deposited on 2021-10-21

2last month

Acq. date: 2026-02-24