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Browsing by Author "Simone, A."

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    HF etching mechanisms of advanced low-k films

    Verdonck, Patrick  
    ;
    Le, Quoc Toan  
    ;
    Krishtab, Mikhail  
    ;
    Vanstreels, Kris  
    ;
    Armini, Silvia  
    ;
    Simone, A.
    Proceedings paper
    2014, IEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC, 20/05/2014, p.155-158

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