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    Characterization and barrier properties for Cu metallization of tungsten nitride deposited by PECVD using WF6 +N2 +H2

    Li, Hua
    ;
    Heyvaert, Ilse  
    ;
    Sing, Jin
    ;
    Lanckmans, Filip
    ;
    Brijs, Bert
    ;
    Bender, Hugo  
    ;
    Maex, Karen  
    Proceedings paper
    1999, Advanced Metallization Conference in 1998 - AMC 1998, 6/10/1998, p.297-303

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