Publication:
Characterization and barrier properties for Cu metallization of tungsten nitride deposited by PECVD using WF6 +N2 +H2
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1949 since deposited on 2021-10-14
1last month
Acq. date: 2026-04-25
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Statistics
Views
1949 since deposited on 2021-10-14
1last month
Acq. date: 2026-04-25
Citations