Browsing by Author "Slater, S."
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Publication Introducing 193 nm lithography
Proceedings paper1998, Proceedings of the Microlithography Symposium. Interface '98, 15/11/1998, p.179-198Publication Lithographic performance of 193 nm single and bi-layer materials
Journal article1998, Journal of Photopolymer Science and Technology, (11) 3, p.513-23