Browsing by Author "Slesazeck, S."
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Publication High-resolution scanning spreading resistance microscopy of surrounding-gate transistors
;Alvarez, D. ;Schömann, S. ;Goebel, B. ;Manger, D. ;Schlösser, T. ;Slesazeck, S. ;Hartwich, J.Kretz, J.Journal article2004-01, Journal of Vacuum Science and Technology B, (22) 1, p.377-380