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Browsing by Author "Slesazeck, S."

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    High-resolution scanning spreading resistance microscopy of surrounding-gate transistors

    Alvarez, D.
    ;
    Schömann, S.
    ;
    Goebel, B.
    ;
    Manger, D.
    ;
    Schlösser, T.
    ;
    Slesazeck, S.
    ;
    Hartwich, J.
    ;
    Kretz, J.
    Journal article
    2004-01, Journal of Vacuum Science and Technology B, (22) 1, p.377-380

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