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Articles
High-resolution scanning spreading resistance microscopy of surrounding-gate transistors
Publication:
High-resolution scanning spreading resistance microscopy of surrounding-gate transistors
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Date
2004-01
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Alvarez, D.
;
Schömann, S.
;
Goebel, B.
;
Manger, D.
;
Schlösser, T.
;
Slesazeck, S.
;
Hartwich, J.
;
Kretz, J.
;
Eyben, Pierre
;
Fouchier, Marc
;
Vandervorst, Wilfried
Journal
Journal of Vacuum Science and Technology B
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1983
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1983
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-10
Citations