Publication:

High-resolution scanning spreading resistance microscopy of surrounding-gate transistors

Date

2004-01
Journal article
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Author(s)

Alvarez, D.
;
Schömann, S.
;
Goebel, B.
;
Manger, D.
;
Schlösser, T.
;
Slesazeck, S.
;
Hartwich, J.
;
Kretz, J.
;
Eyben, Pierre  
;
Fouchier, Marc
;
Vandervorst, Wilfried  

Journal

Journal of Vacuum Science and Technology B

Abstract

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1983 since deposited on 2021-10-15
Acq. date: 2026-01-25

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1983 since deposited on 2021-10-15
Acq. date: 2026-01-25

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