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Browsing by Author "Snauwaert, J."

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    On the determination of two-dimensional carrier distributions

    Vandervorst, Wilfried  
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    Clarysse, Trudo
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    De Wolf, Peter
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    Hellemans, L.
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    Snauwaert, J.
    Proceedings paper
    1995, 3rd Int. Workshop on the Measurement and Characterizaton of Ultra-Shallow Dopant Profiles in Semiconductors, 20/03/1995, p.41.1-41.19
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    On the determination of two-dimensional carrier distributions

    Vandervorst, Wilfried  
    ;
    Clarysse, Trudo
    ;
    De Wolf, Peter
    ;
    Hellemans, L.
    ;
    Snauwaert, J.
    Journal article
    1995, Nuclear Instruments and Methods in Physics Research B, (96) 1_2, p.123-32
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    One and two-dimensional carrier profiling in semiconductors by nano-SRP

    De Wolf, Peter
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    Clarysse, Trudo
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    Vandervorst, Wilfried  
    ;
    Snauwaert, J.
    ;
    Hellemans, L.
    Proceedings paper
    1995, 3rd Int. Workshop on the Measurement and Characterizaton of Ultra-Shallow Dopant Profiles in Semiconductors, 20/03/1995, p.32.1-32.9
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    One- and two-dimensional carrier profiling in semiconductors by nanospreading resistance profiling

    De Wolf, Peter
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    Clarysse, Trudo
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    Vandervorst, Wilfried  
    ;
    Snauwaert, J.
    ;
    Hellemans, L.
    Journal article
    1996, Journal of Vacuum Science and Technology B, (14) 1, p.380-385
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    Silicon surface roughening by the decomposition of hydrogen peroxide

    Schmidt, Harald
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    Meuris, Marc  
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    Mertens, Paul  
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    Verhaverbeke, Steven
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    Heyns, Marc  
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    Hellemans, L.
    Proceedings paper
    1994, Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 15/10/1993, p.102-110
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    Towards a physical understanding of spreading resistance probe profiling

    Snauwaert, J.
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    Hellemans, L.
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    Czech, Ingrid
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    Clarysse, Trudo
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    Vandervorst, Wilfried  
    ;
    Pawlik, M.
    Journal article
    1994, Journal of Vacuum Science and Technology B, (12) 1, p.304-311

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