One- and two-dimensional carrier profiling in semiconductors by nanospreading resistance profiling

Publication:

1996

Journal article

Author(s)

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Journal of Vacuum Science and Technology B

2 since deposited on 2021-09-29

Acq. date: 2026-06-24

1928 since deposited on 2021-09-29

Acq. date: 2026-06-26