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Browsing by Author "Sobieski, Daniel"

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    Self-aligned-quadruple-patterning for N7/N5 silicon fins

    Altamirano Sanchez, Efrain  
    ;
    Tao, Zheng  
    ;
    Gunay Demirkol, Anil
    ;
    Lorusso, Gian  
    ;
    Hopf, Toby  
    Proceedings paper
    2016, SPIE Lithography Symposium Advanced Etch Technology for Nanopatterning V, 22/02/2016, p.DOI: 10.1117/2.1

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