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Browsing by Author "Somervell, M."

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    Exploration of new resist chemistries and process methods for enabling dual-tone development

    Fonseca, Carlos
    ;
    Somervell, M.
    ;
    Scheer, S.
    ;
    Kuwahara, Y.
    ;
    Nafus, Kathleen  
    ;
    Gronheid, Roel  
    Proceedings paper
    2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009

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