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Browsing by Author "Song, Seung Keun"

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    Publication

    Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition

    Nye, Rachel  
    ;
    Song, Seung Keun
    ;
    Van Dongen, Kaat  
    ;
    Delabie, Annelies  
    ;
    Parsons, Gregory N.
    Journal article
    2022, APPLIED PHYSICS LETTERS, (121) 8, p.Art. 082102

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