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Browsing by Author "Sonnemans, R."

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    Optimization of resist ash processes on Si045Ge055 substrates for post extension-halo ion implantation

    Mannaert, Geert  
    ;
    Vos, Rita  
    ;
    Tsvetanova, Diana  
    ;
    Altamirano Sanchez, Efrain  
    ;
    Witters, Liesbeth  
    Proceedings paper
    2011, ULSI Process Integration 7, 9/10/2011, p.283-291

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