Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Sonoda, Akihiko"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Resist coating and developing process technology toward EUV manufacturing sub 7nm node

    Kamei, Yuya
    ;
    Shiozawa, Takahiro
    ;
    Kawakami, Shinichiro
    ;
    Shite, Hideo
    ;
    Ichinomiya, Hiroshi
    Proceedings paper
    2018, International Symposium on Semiconductor Manufacturing (ISSM), 10/12/2018, p.1-4

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings