Publication:

Resist coating and developing process technology toward EUV manufacturing sub 7nm node

Date

2018

Proceedings Paper

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Files

42026.pdf 253.07 KB

Author(s)

;

Shiozawa, Takahiro

;

Kawakami, Shinichiro

;

;

Ichinomiya, Hiroshi

;

Hashimoto, Yusaku

;

Enomoto, Masashi

;

Nafus, Kathleen

;

Sonoda, Akihiko

;

;

Foubert, Philippe

Statistics

1939 since deposited on 2021-10-25

2last month

Acq. date: 2026-04-25