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Browsing by Author "Sophie, Guus"

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    Characterization and integration in Cu damascene structures of AURORA, an inorganic low-k dielectric

    Alves Donaton, Ricardo
    ;
    Coenegrachts, Bart  
    ;
    Sleeckx, Erik  
    ;
    Schaekers, Marc  
    ;
    Sophie, Guus
    Proceedings paper
    2001, Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics, 23/04/2000, p.D5.14.1-D5.14-6

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